PIXEL CIRCUIT SUBSTRATE, LIQUID CRYSTAL DISPLAY APPARATUS, METHOD OF MANUFACTURING THE SAME AND PROJECTION DISPLAY APPARATUS
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United States of America Patent
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app pub date -
Jul 28, 2009
filing date -
Nov 10, 2004
priority date (Note) -
Abandoned
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Abstract
A pixel circuit substrate includes a first interlayer insulating film which is made of an inorganic material at least in a source and drain regions of a thin film transistor. A contact hole is formed in an area above the source and drain regions of a thin film transistor in the first interlayer insulating film. A wiring layer is formed on the first interlayer insulating film, extends to an inner wall and a bottom surface of the contact hole. On a top surface of the wiring layer is formed a recess reflecting the shape of a contact hole. A second interlayer insulating film is formed on the wiring layer, embedded in the recess and has a flat top surface in an area above the thin film transistor. A storage capacitor on the second interlayer insulating film is disposed in the area above the thin film transistor.
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