NON-VOLATILE MEMORY STRUCTURE AND METHOD FOR PREPARING THE SAME
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United States of America Patent
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Issued Date -
Nov 19, 2009
app pub date -
May 16, 2008
filing date -
May 16, 2008
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Abandoned
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Abstract
A non-volatile memory structure includes a substrate having two doped regions, a charge-trapping structure positioned substantially between the two doped regions, and a conductive structure positioned on the charge-trapping structure, wherein the charge-trapping structure includes a silicon-oxy-nitride layer and metallic nano-dots embedded in the silicon-oxy-nitride layer. The non-volatile memory structure formed by performing a first thermal oxidation process to form a high-k dielectric layer on a substrate, forming a metal-containing semiconductor layer including silicon or germanium on the high-k dielectric layer, forming a silicon layer on the metal-containing semiconductor layer, and performing a second thermal oxidation process to convert the metal-containing semiconductor layer to a silicon-oxy-nitride layer with embedded metallic nano-dots, wherein at least one of the first thermal oxidation process and the second thermal oxidation process is performed in a nitrogen-containing atmosphere.
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