Independent upper side and lower side drive type double-sided simultaneous exposure system
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United States of America Patent
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Issued Date -
Nov 12, 2009
app pub date -
May 29, 2008
filing date -
May 7, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A maskless type exposure system using an exposure engine on which a digital micromirror device (DMD) is mounted includes an independent upper and lower side drive type double-sided simultaneous exposure system, in which a flexible object of exposure, including a flexible board, such as a chip-on-film (COF) or a lead frame, is fed in a rolled state, and is simultaneously exposed throughout an exposure pattern thereof on upper and lower sides thereof by independently driving a plurality of exposure engines in x, y and z axial directions in the case where the flexible exposure object has a large area or a restricted exposure region, thereby reducing costs based on minimized defective proportion and maximized productivity.
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