Composition for removing protective layer in fabrication of MEMS and method for removing same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Oct 29, 2009
app pub date -
Apr 23, 2008
filing date -
Apr 23, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
There is provided a composition that can effectively remove a protective coating and a primer coating that have a resistance to etching solutions and are rendered unnecessary after wet-etching treatment in MEMS fabrication processes, and a method for removing the protective layer. The composition contains (A) at least one organic solvent selected from the group consisting of amides, lactones, pyrrolidones and ketones, (B) water, and (C) a fluoride, in an amount of 80.00 to 99.90 mass %, 0.05 to 12.00 mass %, and 0.05 to 8.00 mass %, respectively. The composition may further contain (D) phosphoric acid, phosphonic acid or phosphinic acid in an amount over 0 mass part to 5.5 mass parts, or (E) an organic amine in an amount over 0 mass part to 45 mass parts, based on 100 mass parts of the composition.
First Claim
all claims..Other Claims data not available
Family
- No Family data available.
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
NISSAN CHEMICAL INDUSTRIES LTD | 7-1 KANDA-NISHIKI-CHO 3-CHOME CHIYODA-KU TOKYO 1010054 | |
BREWER SCIENCE INC | 2401 BREWER DRIVE ROLLA MO 65401 |
International Classification(s)

- 2008 Application Filing Year
- C11D Class
- 413 Applications Filed
- 274 Patents Issued To-Date
- 66.35 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Aoba, Kazuhiro | Toyama-shi , JP | 5 | 18 |
# of filed Patents : 5 Total Citations : 18 | |||
Uehara, Hiroyuki | Toyama-shi , JP | 22 | 339 |
# of filed Patents : 22 Total Citations : 339 | |||
Xu, Gu | Rolla , US | 27 | 489 |
# of filed Patents : 27 Total Citations : 489 | |||
Zhong, Xing-Fu | Rolla , US | 21 | 206 |
# of filed Patents : 21 Total Citations : 206 |
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Patent Citation Ranking
- 0 Citation Count
- C11D Class
- 0 % this patent is cited more than
- 16 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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