CYCLICAL OXIDATION PROCESS

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United States of America Patent

APP PUB NO 20090269939A1
SERIAL NO

12395443

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Abstract

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or combinations thereof, can be provided to enhance the selectivity of the oxidation process. The nitrogen source can act as an oxygen scavenger to enhance oxidation selectively, or undesired oxidation can also be further prevented or limited by introducing other oxygen scavengers, such as hydrazine.

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Patent Owner(s)

Patent OwnerAddress
ASM INTERNATIONAL N VALMERE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sprey, Hessel Kessel-lo , BE 19 3317

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