PLANAR HEATER AND SEMICONDUCTOR HEAT TREATMENT APPARATUS PROVIDED WITH THE HEATER

United States of America Patent

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Issued Date
Oct 29, 2009
app pub date
Aug 22, 2007
filing date
Sep 28, 2006

priority date (Note)
Abandoned

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Abstract

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above the above-mentioned carbon wire heating element CW.

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Patent Owner(s)

Patent Owner	Address
TOKYO ELECTRON LIMITED	TOKYO 107-6325
COVALENT MATERIALS CORPORATION	6-3 OHSAKI 1-CHOME SHINAGAWA-KU TOKYO

International Classification(s)

H05B:ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE ....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kawasaki, Hiroo	Nirasaki-shi , JP	12	598
Shibata, Kazuo	Tokyo , JP	28	430

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PLANAR HEATER AND SEMICONDUCTOR HEAT TREATMENT APPARATUS PROVIDED WITH THE HEATER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12441639

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12441639

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