CLUSTER APPARATUS FOR PROCESSING SUBSTRATE AND METHOD FOR PROCESSING SUBSTRATE USING CLUSTER APPARATUS
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United States of America Patent
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N/A
Issued Date -
Oct 22, 2009
app pub date -
Oct 24, 2008
filing date -
Apr 18, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A cluster apparatus for processing a substrate includes a load-lock chamber to receive a substrate, a transfer chamber adjacent to the load-lock chamber, one or more processing chambers each having a side facing the transfer chamber, and a robot in the transfer chamber to unload the substrate from or load the substrate into at least one of the one or more processing chambers or the load-lock chamber. A rotating stage is included in the load-lock chamber to support and rotate the substrate to a desired orientation.
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