Method for Producing a Tubular Semifinished Product From Fluorine-Doped Quartz Glass
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United States of America Patent
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Issued Date -
Oct 22, 2009
app pub date -
Jun 26, 2007
filing date -
Jul 7, 2006
priority date (Note) -
Abandoned
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Abstract
particles by means of plasma burners and in the presence of fluorine, and depositing said particles in layers on the cylindrical outer surface of the substrate tube rotating about its longitudinal axis with formation of a mother tube consisting of fluorine-doped quartz glass; and (c) elongating the mother tube in an elongation process to obtain the tubular semifinished product.
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