DRYING APPARATUS FOR PLATE ELEMENTS FOR ELECTRONICS AND THE LIKE, AND RELATIVE METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20090260255A1
SERIAL NO

12257468

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A drying apparatus for silicon or alumina-based plate elements, such as the type for electronics, or other types of plates for electronics, comprises an oven that develops along a path and having a drying chamber that develops along the path, on a relative lying plane. The oven has an entrance (21) into the chamber and an exit from the chamber. The plate elements are fed into the chamber from the entrance to the exit along the path by means of a translation unit in order to effect a drying cycle. The translation unit comprises planar support elements able to advance along the chamber, which are disposed along the path and orthogonally thereto and inclined downwards with respect to the lying plane of the chamber by a relative angle. The plate elements are disposed on the planar support elements so as to define, during normal use, a passage way for the drying air, also below the plate elements.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ITALIA S R LVIA POSTUMIA OVEST 244 FRAZIONE OLMI SAN BIAGIO DI CALLALTA (TV) 31048

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BACCINI, Andrea San Biagio Di Callalta (tv) , IT 45 203

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