Advanced cleaning process using integrated momentum transfer and controlled cavitation
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United States of America Patent
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Issued Date -
Oct 15, 2009
app pub date -
Apr 14, 2008
filing date -
Apr 14, 2008
priority date (Note) -
Abandoned
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Abstract
A method and apparatus for cleaning a workpiece are disclosed. A gas and cleaning solution are supplied to an atomizing nozzle which atomizes the cleaning solution and sprays the top surface of a workpiece with an atomized spray. A liquid having a controlled gas content is flowed to the top surface of the workpiece from a rinse nozzle. Megasonic energy is applied from the backside of the workpiece.
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