Method and apparatus for imprinting microstructure and stamper therefor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 5, 2012
Grant Date -
Oct 1, 2009
app pub date -
Feb 19, 2009
filing date -
Mar 31, 2008
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method of imprinting a microstructure comprising: contacting a stamper comprising a pattern layer with the microstructure of the order of from micrometers to nanometers in one face of the pattern layer and a substrate supporting the pattern layer with an imprinting member having a deformable layer to which the microstructure is imprinted, wherein the pattern layer is supported on a round surface having a prescribed radius of curvature of the substrate, the center of the round surface protruding towards the rear face of the pattern layer; causing the deformable layer on the imprinting member; and separating the stamper from the cured deformable layer.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully