Valve module

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20090242046A1
SERIAL NO

12080067

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system for pressurizing and exhausting a vented chamber is disclosed. The present disclosure includes a unitary module having two integrated valves for each supported chamber, a single inlet port for each chamber, a single vent exhaust port and a single pressurized port. In addition, a number of pressure gauge ports are provided to allow the pressure at various points to be monitored. In addition, the unitary module optionally includes a leak check port. Using this port, the operator can test the integrity of all valves within the module.

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Patent Owner(s)

Patent OwnerAddress
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC35 DORY ROAD GLOUCESTER MA 01930

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Riordon, Benjamin Newburyport , US 18 67

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