6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements

Number of patents in Portfolio can not be more than 2000

United States of America Patent

SERIAL NO

12454763

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method and apparatus for operating a very high repetition gas discharge laser system magnetic switch pulsed power system is disclosed, which may comprise a solid state switch, a charging power supply electrically connected to one side of the solid state switch; a charging inductor electrically connected to the other side of the solid state switch; a deque circuit electrically in parallel with the solid state switch comprising a deque switch; a peaking capacitor electrically connected to the charging inductor, a peaking capacitor charging control system operative to charge the peaking capacitor by opening the deque switch and leaving the solid state switch open and then shutting the solid state switch. The solid state switch may comprise a plurality of solid state switches electrically in parallel.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
CYMER INCCALIFORNIA USA CALIFORNIA

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Chaofeng San Marcos, US 30 228
Melcher, Paul C El Cajon, US 17 598
Ness, Richard M San Diego, US 52 2513

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation