Dark Field Objective for a Microscope

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20090225414A1
SERIAL NO

12083108

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to an objective for a microscope for dark field microscopy having alternating illumination with grazing incidence. A dark field objective is shown having a front lens for receiving light from a sample and having a dark field illumination device for guiding illumination light onto the sample, the dark field illumination device comprising at least one pair of light decoupling elements, which are each situated in pairs around the front lens opposite to the optical axis for counter parallel illumination of the sample.

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Patent Owner(s)

Patent OwnerAddress
VISTEC SEMICONDUCTOR SYSTEMS GMBH35781 WEILBURG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heiden, Michael Woelfersheim , DE 37 149
Vollrath, Wolfgang Burbach , DE 13 92

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