CLEANING APPARATUS, CLEANING TANK, CLEANING METHOD, AND METHOD FOR MANUFACTURING ARTICLE
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United States of America Patent
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N/A
Issued Date -
Sep 10, 2009
app pub date -
Nov 21, 2008
filing date -
Mar 10, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Ultrasonic generating unit of a cleaning tank in a cleaning apparatus applies ultrasonic waves to cleaning fluid supplied into the cleaning tank from a supply port and fluid jetting unit having openings at locations corresponding to areas to be cleaned of an article to be cleaned jets the ultrasonic-applied cleaning fluid from the openings to the areas to be cleaned of the article to be cleaned.
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