Ceramic Paddle
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United States of America Patent
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Issued Date -
Aug 27, 2009
app pub date -
Feb 20, 2009
filing date -
Feb 21, 2008
priority date (Note) -
Abandoned
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Abstract
A paddle for the production of semiconductor wafers is provided. The paddle can be a cantilever paddle made of a ceramic such as silicon carbide and can be used with round or square wafers, such as photovoltaic wafers. The paddle exhibits excellent deflection and strength characteristics.
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