PROBE OF CANTILEVER PROBE CARD
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United States of America Patent
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N/A
Issued Date -
Aug 27, 2009
app pub date -
Jul 30, 2008
filing date -
Feb 21, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A probe of a cantilever probe card (Epoxy probe card) is disclosed. The probe has a tip and a surface region extended from the tip of the probe about 5-10 mil is coated with a nano-film of high electro-conductive nanomaterial. The thickness of the nano-film is about 1-20 nm. Through the coating process, the nano-film coated on the probe of the cantilever probe card can efficiently provide the excellent advantages of no-clean, stable electro-conductivity, minimum overdrive force and longer usage lifetime for the probe of cantilever probe card. Accordingly, the yield of wafer testing can be improved and the frequency of cleaning the probe can be decreased. Furthermore, the total testing cost can be reduced.
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