Patterned magnetic recording medium and method for manufacturing same
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United States of America Patent
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Issued Date -
Aug 20, 2009
app pub date -
Feb 10, 2009
filing date -
Feb 19, 2008
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Abandoned
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Abstract
A patterned magnetic recording medium includes a magnetic layer having a track-shape and/or dot-shape relief pattern which demarcates information recording regions; a first protective layer covering the magnetic layer; and a second protective layer formed on the first protective layer and including a tetrahedral carbon (ta-C) film. The first protective layer has excellent corrosion resistance and the second protective layer has excellent magnetic head sliding characteristics. A method for manufacturing the medium includes forming an etching pattern of photohardening etching resist on an underlayer or magnetic layer using an imprinting method and etching the underlayer or magnetic layer to form a relief pattern; forming the first protective layer on the relief pattern of the magnetic layer using plasma CVD; and forming the second protective layer including a tetrahedral carbon (ta-C) film, on at least respective top portions of the relief pattern, by a FCA method or by a FCVA method.
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