Film Forming Apparatus, Matching Device, and Impedance Control Method

United States of America Patent

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Issued Date
Jul 30, 2009
app pub date
Jan 24, 2006
filing date
Feb 3, 2005

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Abandoned

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Patent Owner(s)

Patent Owner	Address
MITSUBISHI HEAVY INDUSTRIES LTD	TOKYO TOKYO METROPOLIS
KIRIN BREWERY COMPANY LIMITED	26-1 JINGUMAE 6-CAHOME SHIBUYA-KU TOKYO 150

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B05C:APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Asahara, Yuji	Kanagawa , JP	14	192
Goto, Seiji	Aichi , JP	60	794
Matsuda, Satoshi	Aichi , JP	94	871
Yamakoshi, Hideo	Kanagawa , JP	28	406

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Film Forming Apparatus, Matching Device, and Impedance Control Method

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United States of America Patent

11883580

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11883580

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