Split-gate non-volatile memory devices having nitride tunneling layers

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United States of America Patent

APP PUB NO 20090184359A1
SERIAL NO

12017961

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Abstract

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A memory device having a cell stack and a select gate formed adjacent to the cell stack. The cell stack includes a first trap-free-nitride layer formed on a channel region of a substrate, a second nitride layer formed on the first nitride layer, an oxide layer formed on the second nitride layer, a control gate formed on the high-K oxide layer, and a poly spacer as the select gate formed adjacent to the control gate.

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Patent Owner(s)

Patent OwnerAddress
PROMOS TECHNOLOGIES PTE LTD30 TOH GUAN ROAD # 08-09 ODC DISTRICENTRE 608840

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
He, Yue-Song San Jose , US 69 1374
Mei, Len San Jose , US 15 400

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