BROADBAND ANTIREFLECTIVE OPTICAL COMPONENTS WITH CURVED SURFACES AND THEIR PRODUCTION

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United States of America Patent

APP PUB NO 20090180188A1
SERIAL NO

12294129

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Abstract

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Methods and optical devices are proposed, which comprise a nanostructure (4) on a curved surface so that a broadband antireflective characteristic is obtained. The nanostructure is fabricated by means of a self-masking single step etch process of silicon (3) on the curved surface

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Patent Owner(s)

Patent OwnerAddress
X-FAB SEMICONDUCTOR FOUNDRIES AG99097 ERFURT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bach, Konrad Tiefthal , DE 6 32
Gaebler, Daniel Ilmenau , DE 14 43

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