LASER ADJUSTABLE DEPTH MARK SYSTEM AND METHOD

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United States of America Patent

SERIAL NO

12014695

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Abstract

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A system and method for adjustable laser mark depth is provided. In one embodiment, the system is used in Nd—YAG laser marker for wafer processing in the semiconductor industry, with smart control of the mark depth and expanded work range between the deep mark and the light mark.

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Patent Owner(s)

Patent OwnerAddress
AXT INC4281 TECHNOLOGY DRIVE FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Geng, Yingjie Beijing , CN 1 0
Zhao, Xiaodong Beijing , CN 48 389

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