Method and Device for Electrically Determining the Thickness of Semiconductor Membranes by Means of an Energy Input
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United States of America Patent
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Issued Date -
Jul 9, 2009
app pub date -
Oct 20, 2005
filing date -
Oct 21, 2004
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Abandoned
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Abstract
A method and device for determining the thicknesses of semiconductor membranes uses electrical measurements. Energy is coupled into the membrane in a defined manner and the membrane thickness is determined from the distribution or diffusion of the energy. A change of state of the membrane is detected by measuring electroconductivity of measuring resistances at least one of which is on the membrane. The electroconductivity varies according to the temperature and the mechanical strain of the membrane, which both depend on the thickness of the membrane.
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