PROCESS FOR PRODUCING SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR SUBSTRATE FOR SOLAR APPLICATION AND ETCHING SOLUTION

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United States of America Patent

SERIAL NO

12394402

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Abstract

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Provided is: a process for producing safely at low cost a semiconductor substrate excellent in photoelectric transduction efficiency, in which a fine uneven structure suitable for a solar cell can be formed uniformly with desired size on the surface of the semiconductor substrate; a semiconductor substrate for solar application in which a uniform and fine pyramid-shaped uneven structure is provided uniformly within the surface thereof, and an etching solution for forming a semiconductor substrate having a uniform and fine uneven structure. A semiconductor substrate is etched with the use of an alkali etching solution containing at least one kind selected from the group consisting of carboxylic acids having a carbon number of 1 to 12 and having at least one carboxyl group in a molecule, and salts thereof, to thereby form an uneven structure on the surface of the semiconductor substrate.

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Patent Owner(s)

Patent OwnerAddress
MIMASU SEMICONDUCTOR INDUSTRY CO LTDTAKASAKI-SHI GUNMA 370-3533

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kimura, Yoshimichi Tokyo , JP 6 13
Mashimo, Ikuo Takasaki-shi , JP 6 98
Tsuchiya, Masato Takasaki-shi , JP 43 208

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