Techniques for providing a multimode ion source
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United States of America Patent
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Apr 20, 2010
Grant Date -
Jul 2, 2009
app pub date -
Dec 28, 2007
filing date -
Dec 28, 2007
priority date (Note) -
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Abstract
Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation, the apparatus including an ion source having a hot cathode and a high frequency plasma generator, wherein the ion source has multiple modes of operation.
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