TANDEM TYPE SEMICONDUCTOR-PROCESSING APPARATUS
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United States of America Patent
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N/A
Issued Date -
Jun 25, 2009
app pub date -
Dec 19, 2007
filing date -
Dec 19, 2007
priority date (Note) -
Abandoned
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Abstract
A tandem type semiconductor-processing apparatus includes: a processing section including multiple units arranged in tandem, each of which unit includes a reaction chamber and a load lock chamber with an load lock interface; a FOUP section including at least one FOUP having a wafer cassette and a front opening interface; and a mini-environment section having a single interior connected to the processing section via each load lock interface on one side of the mini-environment section and connected to the FOUP section via each front opening interface on another side of the mini-environment section opposite to the one side.
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