DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME

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United States of America Patent

APP PUB NO 20090160307A1
SERIAL NO

12094250

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by dry etching using the resultant ceramic mask.

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Patent Owner(s)

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SUMITOMO ELECTRIC INDUSTRIES LTDOSAKA JAPAN OSAKA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Imai, Takahiro Hyogo , JP 179 2278
Nishibayashi, Yoshiki Hyogo , JP 95 707
Ueda, Akihiko Hyogo , JP 62 341
Yamamoto, Yoshiyuki Hyogo , JP 122 1470

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