Planar heater

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8071920
APP PUB NO 20090159587A1
SERIAL NO

12270094

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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configured by metal plates or opaque silica glass plates are contained in the large-diameter silica glass tube below the bent portion.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO
COVALENT MATERIALS CORPORATION6-3 OHSAKI 1-CHOME SHINAGAWA-KU TOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayashi, Daisuke Tokyo, JP 252 4626
Shimanuki, Kazuhiko Yamagata, JP 3 25

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