Method of Manufacturing Compound Semiconductor Devices
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United States of America Patent
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app pub date -
Jan 21, 2009
filing date -
Mar 9, 2005
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Abstract
A compound semiconductor device and method of manufacturing the same. The method includes coating a plurality of spherical balls on a substrate and selectively growing a compound semiconductor thin film on the substrate on which the spherical balls are coated. The entire process can be simplified and a high-quality compound semiconductor thin film can be grown in a short amount of time in comparison to an epitaxial lateral overgrowth (ELO) method.
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