Support Pin with Dome Shaped Upper Surface
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United States of America Patent
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N/A
Issued Date -
Jun 11, 2009
app pub date -
Dec 10, 2007
filing date -
Dec 10, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A chuck, which may hold a substrate during stress measurements, includes a number of pins that support the substrate. Each support pin has a dome shaped upper surface that contacts a bottom surface of a substrate when supporting the substrate. The dome shaped upper surface minimizes contact with the substrate as well as assists in maintaining the same contact location with the substrate regardless of substrate shape. The dome shaped upper surface may be formed of a layer of soft material having a high coefficient of static friction to hold the substrate stationary with respect to the pins when the chuck is accelerated moved during or between stress measurements. Additionally, the layer of soft material may be a thin layer that covers a hard internal dome to reduce creep.
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