Inner Surface Exposure Apparatus and Inner Surface Exposure Method Technical Field

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20090147226A1
SERIAL NO

12087651

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus and a method for exposing a photosensitive material deposited on the inner surface of a tube such as a circular or polygonal tube to light to form a predetermined exposed pattern are provided. The apparatus includes: a guide rod that is inserted into the inner space of an exposure object and emits an exposure light beam toward the inner side of the exposure object; and a stage for changing the relative positions of the exposure object and the guide rod and/or the relative angle between the exposure object and the guide rod. After the irradiation spot of the exposure light beam is brought into focus and/or is adjusted to an exposure starting point, the exposure light beam is projected onto a predetermined position on the exposure object to form a predetermined exposed pattern of a photosensitive material deposited on the inner surface of the exposure object.

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Patent Owner(s)

Patent OwnerAddress
TOKYO DENKI UNIVERSITY2 KANDA-NISHIKICHO 2-CHOME CHIYODA-KU TOKYO 101-8457

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujita, Katsuyuki Tochigi , JP 68 1155
Horiuchi, Toshiyuki Tokyo , JP 5 60
Yasuda, Takashi Saitama , JP 105 685

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