DEPOSITION MATERIAL SUPPLYING MODULE AND THIN FILM DEPOSITION SYSTEM HAVING THE SAME
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United States of America Patent
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Issued Date -
Jun 11, 2009
app pub date -
Dec 6, 2008
filing date -
Dec 7, 2007
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Abandoned
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Abstract
A deposition material supplying module includes a canister configured to define a storage space in which a deposition material is stored, a material flow controller provided with at least one groove receiving the deposition material supplied from the canister and adapted to rotate, and a carrier gas supplying unit configured to supply carrier gas to the material flow controller. The deposition material is filled in the groove and a fixed amount of the deposition material is supplied into the process chamber using the deposition material flow controller. Therefore, it is easy to control an amount of the deposition material supplied to the process chamber and the reliability on the fixed-quantity supply can be improved.
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