Loadport
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United States of America Patent
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N/A
Issued Date -
Jun 4, 2009
app pub date -
Nov 19, 2008
filing date -
Nov 29, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A load port particularly well-suited to application in batch processing semiconductor manufacturing processes is provided with a load port main body having a main table onto which a FOUP containing wafers is placed, a mapping means for mapping the wafers contained within the FOUP, and the like, and is further provided with a displacing means for moving the FOUP placed on the main table between the main table and a predetermined position removed a distance from the load port main body, in which the displacing mechanism is provided with an open space enabling the passing of a FOUP which contains wafers between the aforementioned predetermined position and a piece of equipment located adjacent to the load port main body.
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