Imaging Device in a Projection Exposure Machine
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United States of America Patent
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app pub date -
Jan 30, 2009
filing date -
Dec 19, 2001
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Abandoned
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Abstract
An imaging device in a projection exposure machine for microlithography includes at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. The linear drive has at least one moving element, the moving element having a shearing part and a lifting part. The shearing part is arranged to move the optical element and the lifting part is arranged to move the shearing part. The linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.
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