CRYSTAL SILICON ARRAY, AND MANUFACTURING METHOD OF THIN FILM TRANSISTOR
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United States of America Patent
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Issued Date -
May 28, 2009
app pub date -
Nov 25, 2008
filing date -
Nov 27, 2007
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Abandoned
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Abstract
A crystal silicon array includes a crystallized unit region obtained by crystallizing at least a part of a non-single crystal semiconductor film. The crystallized unit region includes at least one square two-dimensional crystal portion having a size of 7 .mu.m square or more, and at least one needle crystal portion having a grain length of 3.5 .mu.m or more.
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