SUBSTRATE ATTACHING APPARATUS
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United States of America Patent
Stats
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N/A
Issued Date -
May 28, 2009
app pub date -
Oct 21, 2008
filing date -
Nov 23, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate attaching apparatus and method are provided. The substrate attaching apparatus may include an upper chamber, a lower chamber, an upper chuck, a lower chuck, a position controller, and a discharging device. The lower chamber may adjoin the upper chamber to define an attaching space therewith. The upper chuck may be provided at a lower portion of the upper chamber so as to mount a first substrate thereon. The lower chuck may be recessed into an upper surface of the lower chamber and/or may be integrally formed with the lower chamber so as to mount a second substrate thereon. The position controller may be provided above the upper chamber to control a position of the first substrate. The discharging device may be provided above the upper chamber or below the lower chamber to apply vacuum pressure to the attaching space.
First Claim
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International Classification(s)
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- B32B Class
- 4.57 % this patent is cited more than
- 16 Age