Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
May 21, 2009
app pub date -
Mar 30, 2006
filing date -
Mar 31, 2005
priority date (Note) -
Abandoned
status (Latency Note)
Importance
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US Family Size
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Non-US Coverage
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Abstract
An inspecting method which is for a microstructure with a movable portion and executes a highly precise inspection without damaging a probe or an inspection electrode by supressing the effect of a needle pressure in contacting the probe to the inspection electrode is provided.When inspection on a microstructure is performed, first a pair of probes (2) are caused to contact respective electrode pads (PD), and the pair of probes (2) and a fritting power source (50) are connected together through relays (30). Next a voltage is applied from the fritting power source (50) to one probe (2) in the pair of probes (2). As the voltage is gradually increased, an oxide film between the pair of probes (2) is destroyed and a current flows between the pair of probes (2) by fritting phenomenon, and the probes (2) and the electrode pad (PD) are electrically conducted each other. Subsequently, the pair of probes (2) are switched to a measuring unit (40) side from the fritting power source (50) through the relays (30), and electrically connected to the measuring unit (40).
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| CN | B | CN101151540 | Mar 30, 2006 |
| JP | B2 | JP4573794 | Mar 30, 2006 |
| WO | A1 | WO2006106876 | Mar 30, 2006 |
| EP | A1 | EP1870714 | Mar 30, 2006 |
| JP | A1 | JPWO2006106876 | Mar 30, 2006 |
| CN | B | CN1866030 | Mar 31, 2006 |
| KR | B1 | KR100845485 | Mar 31, 2006 |
| EP | A2 | EP1707532 | Mar 31, 2006 |
| TW | B | TWI290625 | Mar 31, 2006 |
| TW | B | TWI315403 | Mar 31, 2006 |
| SG | A1 | SG126130 | Mar 31, 2006 |
| US | B2 | US7348788 | Mar 31, 2006 |
| KR | A | KR20070083503 | Feb 23, 2007 |
International Classification(s)
- 2006 Application Filing Year
- G01R Class
- 3321 Applications Filed
- 1958 Patents Issued To-Date
- 58.96 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 4 Citation Count
- G01R Class
- 2.38 % this patent is cited more than
- 16 Age