SOLUTION BASED LANTHANUM PRECURSORS FOR ATOMIC LAYER DEPOSITION
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
May 7, 2009
app pub date -
Oct 30, 2008
filing date -
Nov 6, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Alkyl cyclopentadienyl precursors for use in ALD processes are disclosed. The present invention particularly relates to La alkyl cyclopentadienyl precursors, such as tris(isopropyl-cyclopentadienyl) Lanthanum.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
LINDE NORTH AMERICA INC | 575 MOUNTAIN AVENUE INTELLECTUAL PROPERTY DEPARTMENT MURRAY HILL NJ 07974 |
International Classification(s)

- 2008 Application Filing Year
- C23C Class
- 1299 Applications Filed
- 709 Patents Issued To-Date
- 54.59 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Kim, Kee-Chan | Carlsbad, US | 16 | 28 |
# of filed Patents : 16 Total Citations : 28 | |||
Ma, Ce | San Diego, US | 32 | 963 |
# of filed Patents : 32 Total Citations : 963 | |||
McFarlane, Graham Anthony | Carlsbad, US | 4 | 14 |
# of filed Patents : 4 Total Citations : 14 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 7 Citation Count
- C23C Class
- 3.40 % this patent is cited more than
- 16 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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