Diffraction grating structure and method for manufacturing same
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United States of America Patent
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Aug 28, 2012
Grant Date -
May 7, 2009
app pub date -
Aug 14, 2008
filing date -
Nov 5, 2007
priority date (Note) -
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Abstract
A diffraction grating structure comprises a substrate having a first surface and a second surface opposite to the first surface. A first grating is defined on the first surface and a second grating is defined on the second surface. The first grating includes a plurality of first grooves and has a first grating period. The second grating includes a plurality of second grooves and has a second grating period. The first groove and the second groove are formed by a fast tool servo system.
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