Workpiece support with fluid zones for temperature control
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United States of America Patent
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Jul 5, 2011
Grant Date -
May 7, 2009
app pub date -
Nov 7, 2007
filing date -
Nov 7, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
A workpiece support is disclosed defining a workpiece-receiving surface. The workpiece support includes a plurality of fluid zones. A fluid, such as a gas, is fed to the fluid zones for contact with a workpiece on the workpiece support. The fluid can have selected thermoconductivity characteristics for controlling the temperature of the workpiece at particular locations. In accordance with the present disclosure, at least certain of the fluid zones are at different azimuthal positions. In this manner, the temperature of the workpiece can be adjusted not only in a radial direction but also in an angular direction.
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