NOVEL NITRILE AND AMIDOXIME COMPOUNDS AND METHODS OF PREPARATION
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United States of America Patent
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Issued Date -
Apr 30, 2009
app pub date -
Oct 29, 2008
filing date -
Oct 29, 2007
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Abstract
The present application relates to semiconductor processing compositions comprising at least one compound containing at least one amidoxime functional group and to methods of using these compositions in semiconductor processing. The present application also describes the preparation of amidoximes for a semiconductor processing composition by (a) mixing a cyanoethylation catalyst, a nucleophile and an alpha-unsaturated nitrile to produce a cyanoethylation product; and (b) converting a cyano group in the cyanoethylation product into an amidoxime functional group.
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