AMIDOXIME COMPOUNDS AS CHELATING AGENTS IN SEMICONDUCTOR PROCESSES

United States of America Patent

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Issued Date
Apr 30, 2009
app pub date
Oct 29, 2008
filing date
Oct 29, 2007

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Abandoned

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Abstract

The present invention is a composition and cleaning method for use in semiconductor processes wherein the compositions comprises at least one amidoxime compound.

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Patent Owner	Address
EKC TECHNOLOGY INC	2520 BARRINGTON COURT HAYWARD CA 94545

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Anderson, Albert G	Wilmington, US	21	319
Lee, Wai Mun	Fremont, US	93	1252
Scialdone, Mark A	West Grove, US	59	424

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AMIDOXIME COMPOUNDS AS CHELATING AGENTS IN SEMICONDUCTOR PROCESSES

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12260358

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APP PUB NO	20090107520A1
SERIAL NO	12260358
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12260358

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