Member for a Plasma Processing Apparatus and Method of Manufacturing the Same

United States of America Patent

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Issued Date
Apr 23, 2009
app pub date
Feb 20, 2007
filing date
Mar 27, 2006

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Abandoned

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Abstract

A member for a plasma processing apparatus, which is excellent in film-formability, durability, and reliability, is provided..

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Patent Owner(s)

Patent Owner	Address
TOHOKU UNIVERSITY	SENDAI PREFECTURE MIYAGI PREFECTURE JAPAN SENDAI-SHI MIYAGI
NIHON CERATEC CO LTD	MIYAGI PREFECTURE JAPAN

International Classification(s)

C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Iguchi, Mabito	Miyagi, JP	3	6
Kitano, Masafumi	Miyagi , JP	22	250
Ohmi, Tadahiro	Miyagi , JP	798	14083
Satou, Keisuke	Miyagi, JP	10	99
Tsutai, Yoshihumi	Miyagi, JP	2	21

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Member for a Plasma Processing Apparatus and Method of Manufacturing the Same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12224784

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APP PUB NO	20090101070A1
SERIAL NO	12224784
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12224784

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