Leak testing method and leak testing device

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United States of America Patent

APP PUB NO 20090100909A1
SERIAL NO

11663391

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Abstract

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A leak testing device includes a chamber which is hermetically sealed towards the environment, having a test object filled with a test gas that is positioned in the chamber. In the chamber, a partial-pressure sensor is arranged that selectively responds to the test gas, but not to the filler gas. Thus, a leak test can be simply performed without high vacuum and without mass spectrometers.

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Patent Owner(s)

Patent OwnerAddress
INFICON GMBHBONNER STRASSE 498 KÖLN 50968

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grosse, Bley Werner Bonn, DE 24 177
Wetzig, Daniel Cologne, DE 54 239

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