METHOD FOR VOLUMETRICALLY CALIBRATING A LIQUID FLOW CONTROLLER WHILE MAINTAINING THE LIQUID IN A CLOSED SYSTEM
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United States of America Patent
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Issued Date -
Apr 9, 2009
app pub date -
Oct 31, 2007
filing date -
Oct 8, 2007
priority date (Note) -
Abandoned
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Abstract
Methods and apparatus for determining if it is necessary to calibrate a liquid flow controller which is contained in a liquid distribution system, where the liquid distribution system supplies a fluid to a semiconductor processing tool. The determination is made while maintaining system as closed, such that fluid does not need to be removed from the liquid distribution system.
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