ELECTROSTATIC CHUCK MEMBER
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United States of America Patent
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Issued Date -
Mar 26, 2009
app pub date -
Sep 26, 2008
filing date -
Sep 26, 2007
priority date (Note) -
Abandoned
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Abstract
An electrostatic chuck member comprises an electrode layer and an electric insulating layer, wherein a spray coating layer of an oxide of a Group 3A element in the Periodic Table is formed as an outermost layer of the member and a surface of the spray coating layer is rendered into a densified re-melting layer having an average surface roughness (Ra) Of 0.8-3.0 μm.
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