MEANS AND METHOD FOR DETERMINING THE SPATIAL POSITION OF MOVING ELEMENTS OF A COORDINATE MEASURING MACHINE

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United States of America Patent

APP PUB NO 20090073458A1
SERIAL NO

12193229

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A means and a method for determining the spatial position of at least one moving element (9, 20) of a coordinate measuring machine (1) are disclosed. At least one laser interferometer (24) directs a measurement beam (23) to the moving element (9, 20). At least one laser interferometer directs a further measurement beam to the moving element to determine a rotation of the moving element (9, 20) around an X-coordinate direction or around a Y-coordinate direction or around a Z-coordinate direction.

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Patent Owner(s)

Patent OwnerAddress
VISTEC SEMICONDUCTOR SYSTEMS GMBHERNST-LEITZ-STRASSE 17-37 WETZLAR D-35578

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heiden, Michael Wolfersheim, DE 37 149
Rinn, Klaus Heuchelheim, DE 23 258

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