APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
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United States of America Patent
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Issued Date -
Mar 19, 2009
app pub date -
Sep 16, 2008
filing date -
Sep 18, 2007
priority date (Note) -
Abandoned
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Abstract
A cleaning processing part including an edge cleaning processing unit for cleaning an edge of a substrate is provided in an indexer block. An indexer robot provided in the indexer block transports an unprocessed substrate taken out of a cassette to the cleaning processing part before transporting the unprocessed substrate to an anti-reflection film processing block serving as a processor. The cleaning processing part cleans an edge and a back surface of a substrate.
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