Method and apparatus for the production of high purity tungsten hexafluoride

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United States of America Patent

APP PUB NO 20090068086A1
SERIAL NO

11899854

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Abstract

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gas by using carbonaceous materials are described. The apparatus and methods are particularly useful for removing high volatility impurities and for removing transition metal impurities, particularly chromium and molybdenum.

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Patent Owner(s)

Patent OwnerAddress
LINDE NORTH AMERICA INC575 MOUNTAIN AVENUE INTELLECTUAL PROPERTY DEPARTMENT MURRAY HILL NJ 07974

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hogle, Richard Allen US 2 2
Ma, Ce US 32 963
Precourt, Dennis US 2 0
Whitlock, Walter Hugh US 1 0

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