Plasma System
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United States of America Patent
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Issued Date -
Mar 12, 2009
app pub date -
Nov 3, 2005
filing date -
Nov 5, 2004
priority date (Note) -
Abandoned
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Abstract
In a process for plasma treating a surface, a non-equilibrium atmospheric pressure plasma is generated within a dielectric housing having an inlet and an outlet through which a process gas flows from the inlet to the outlet. A tube formed at least partly of dielectric material extends outwardly from the outlet of the housing, whereby the end of the tube forms the plasma outlet. The surface to be treated is positioned adjacent to the plasma outlet so that the surface is in contact with the plasma and is moved relative to the plasma outlet.
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